RHEED Electron Gun
& Power Supply
(RDA-004G/004P)
RHEED Image
Analysis System
(kSA400)
Real-time Monitoring
of Wafer/Thin
Film Temperature
(kSA BandiT)
Real-time Monitoring
of Thin Film Curvature/
Stress
(kSA MOS)
Ex-situ Curvature/Stress
2D/3D Mapping of
Substrates up to 300mm
(kSA MOS Ultra Scan)
UHV Evaporator/
Magnetron
Sputtering Cell
Rotary/Linear Motion
Feedthrough
UHV Manipulators
Vacuum Pump
Vacuum Pump
Peripheral Products
Valve
Vacuum component
parts
(O-ring, Nipple, Clump,
etc.)
Flange
Gasket
Viewport
Mass Flow Controller
(MFC),
Mass Flow Meter,
etc.
Vacuum Gauge
Gauge Head, Filament
Quadruple Mass
Spectrometer (Q-MS)
Thin Film Deposition
Growth Rate Monitor
/Controller and
Film Thickness
Measurement
Electrical Feedthrough
Leak Detector
Heating/Cooling
Equipment
Others
Products Information
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