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RHEED Electron Gun
& Power Supply
(RDA-004G/004P)
RHEED Image
Analysis System
(kSA400)
Real-time Monitoring
of  Wafer/Thin
Film Temperature
(kSA BandiT)
Real-time Monitoring
of Thin Film Curvature/
Stress
(kSA MOS)
 
     
Ex-situ Curvature/Stress
2D/3D Mapping of
Substrates up to 300mm
(kSA MOS Ultra Scan)
UHV Evaporator/
Magnetron
Sputtering Cell
     







     
Rotary/Linear Motion
Feedthrough
UHV Manipulators      









 
Vacuum Pump Vacuum Pump
Peripheral Products
Valve Vacuum component
parts
(O-ring, Nipple, Clump,
etc.)
 
 
Flange Gasket Viewport Mass Flow Controller
(MFC),
Mass Flow Meter,
etc.
 
 
Vacuum Gauge Gauge Head, Filament Quadruple Mass
Spectrometer (Q-MS)
Thin Film Deposition
Growth Rate Monitor
/Controller and
Film Thickness
Measurement
 
 
Electrical Feedthrough Leak Detector Heating/Cooling
Equipment
Others  
         

Products Information
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