Desktop-Type CVD system for Producing ZnO Nanorods
It synthesizes ZnO nanorods by Zn evaporation in low-pressure air.
sub-oriented ZnO nanorods/Si
sub-oriented ZnO nanorods/Si
oriented ZnO nanorods/Sapphire
Specifications
(Spec. may change without notice in order to optimize the performance)
Main Unit
glass chamber
purge gas port
vacuum pump port
leak port
vacuum gauge
electrode port
dimension
φ160mm x H125mm
1
1
1
1(bourdon gauge)
2pairs
W400mm x H230mm x D265mm
Substrate Heater
size
operation temperature
25mm x 40mm
400~750°C
Power Supply (2 units)
output current
output power
input power
dimension
40A
400W
AC90-250 1Φ 50-60Hz
W110mm x H130mm x D40mm
Vacuum Pump
oil-sealed rotary pump
Optional parts:
- Radiation Thermometer
