| CANON ANELVA |
Various vacuum pumps, vacuum valves, vacuum gauges,
mass spectrometers, vacuum components, sputtering devices, dry etching
devices, deposition equipments, MBE device
Manufacturing equipment related to electron devices (disks, displays)
and semiconductors |
| AVC
Co., Ltd. |
Design, manufacture, and reconstruction
of custom-built vacuum devices for research and development
Analyzers, MBE systems (Molecular Beam Epitaxy systems,)
Manipulators,
Various feedthroughs |
| ELC
Co., Ltd. |
Control and measurement system using computers
(e.g.) control of cell, shutter and substrate temperature of the
MBE systems
Remote control and monitoring of the system
(automatic/manual), and data logging
program setting of automatic operation
DC power supply for heat-control
manufacturing special electronic furnace |
| VAT |
VAT Switzerland : Gate valves
(viton seals, all-metal seals)
EVAC Switzerland: Clamp chains
(for high vacuum, ultra high vacuum, glass or quartz) |
| UNISOKU
Co., Ltd. |
Cryogenic STM
Cryogenic STM in high magnetic field
AFM (atomic force microscope) |
| FLOW
CREATE CO., LTD. |
MFC gas leading-in devices (for sputter, CVD, RIE,
MO-CVD,MBE)
Ultra-clean metal diaphragm valves
Ultra-clean gas piping |
| k-Space
Associates, Inc. |
Analytic RHEED systems
Thin Film Stress, Wafer Curvature, and Thickness Measurement Tool
Band Gap Wafer Temperature Sensor |
|
| MKS
Japan, Inc. |
"Baratron" high accuracy pressure gauges
Automatic pressure/flow controllers
Pressure, vacuum calibration systems
Mass spectrometers and relative devices< |
| SHIMADZU |
Turbo molecular pumps
(50 to 3700L/sec, chemical, magnetic float, mounting from every
direction)
Mechanical booster pumps
Helium leak detectors |
| KYOCERA |
Ultra high vacuum current feedthrougs
(BNC, SHV, MHV, N, SMA, ultra high voltage, terminals etc.)
Ceramic insulating flanges
Ceramic application custom-built products
Sapphire viewing ports
Sapphire substrates,
Ceramic substrates |
| ADVANCED
ENERGY JAPAN K.K |
Various radio frequency power supplies
DC power supplies
Point-of-use thermoelectric temperature controllers
High precision optical fiber thermometers
High precision mass flow controllers (sonic nozzle, thermal) |
| MMR Technologies |
Micro-miniature refrigerator,
Micro-probe system,
Seebeck measurement system,
Hall measurement system |
|