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R-DEC Co., Ltd.
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"VACSTAGE" SERIES

The"Vacstage" Series, designed, developed and manufactured by AVC Co., Ltd. in order to meet customers' various
requirements, allows users to manipulate samples and locate them precisely in ultra high vacuum (UHV) environment.
Special specification is also available mostly for the low-priced products. We would be pleased to make full use of our
experience and help customer's installation and extension of the existing system.
Please feel free to contact us.
LINEAR MOTION Z STAGE (ALMS 275 SERIES)
Allowable Leak Rate 1.33 x 10-11 Pa·m3/sec Maximum
Vacuum Sealing Method Welded Bellows
Allowable Heating Temperature 200 degrees C Maximum
Connect Flange ICF70 /ICF114
Travel Flange ICF70
Travel Z=50mm /100mm
Travel Resolution Z=0.1mm




LINEAR MOTION Z STAGE (ALMS 275 SERIES)
Allowable Leak Rate 1.33 x 10-11 Pa·m3/sec Maximum
Vacuum Sealing Method Welded Bellows
Allowable Heating Temperature 200 degrees C Maximum
Connect Flange ICF70
Travel Flange ICF70
Travel Z=50mm /100 /150 /200mm
Travel Resolution Z=0.5mm




LINEAR MOTION Z STAGE (ALMS 275 SERIES)
Allowable Leak Rate 1.33 x 10-11 Pa·m3/sec Maximum
Vacuum Sealing Method Welded Bellows
Allowable Heating Temperature 200 degrees C Maximum
Connect Flange ICF114
Travel Z=50mm /100 /150 /200 /300mm
Travel Resolution Z=0.5mm




3-AXIS MANIPULATOR (AMP SERIES)
Allowable Leak Rate 1.33 x 10-11 Pa·m3/sec Maximum
Vacuum Sealing Method Welded Bellows
Allowable Heating Temperature 200 degrees C Maximum
Connect Flange ICF203 /ICF152 /ICF114
Travel Flange ICF70
Travel XY=+/-12.5mm
Travel Resolution: 0.01mm, 0.005mm
Z=+/-12.5mm
Travel Resolution: 0.5mm, 0.005mm
Conductive Port ICFφ203=ICFφ34 × 5
ICFφ152=ICFφ34 × 4




LARGE GAUGE 3-AXIS MANIPULATOR (ALF 3 SERIES)
Allowable Leak Rate 1.33 x 10-11 Pa·m3/sec Maximum
Vacuum Sealing Method Welded Bellows
Allowable Heating Temperature 200 degrees C Maximum
Connect Flange ICF203
Travel Flange ICF203 /ICF152
Travel XY=+/-12.5mm
Travel Resolution: 0.005mm 
Z=50 /100 /150 /250 /300mm 
Travel Resolution: 0.5mm, 0.005mm




XY STAGE (AXY SERIES)
Allowable Leak Rate 1.33 x 10-11 Pa·m3/sec Maximum
Vacuum Sealing Method Welded Bellows
Allowable Heating Temperature 200 degrees C Maximum
Connect Flange ICF70 /ICF114 /ICF152 /ICF203
Travel Flange ICF70 /ICF114
X, Y Travel XY=+/-12.5mm
Travel Resolution: 0.01mm, 0.005mm 




TILT STAGE (ATS SERIES)
Allowable Leak Rate 1.33 x 10-11 Pa·m3/sec Maximum
Vacuum Sealing Method Welded Bellows
Allowable Heating Temperature 200 degrees C Maximum
Connect Flange ICF70 /ICF114
Travel Flange ICF70 /ICF114
Angle +/-5 degrees




MAGNET FEEDTHROUGH (AMF SERIES)
Allowable Leak Rate 1.33 x 10-11 Pa·m3/sec Maximum
Drive Method Magnet Coupling
Straight Power 60N
Rotation Torque 0.8N · m
Allowable Heating Temperature 200 degrees C Maximum
Connect Flange ICF70 /ICF114
Travel Flange ICF70
Axis Travel Diameter φ10
Stroke 400 /500 /300 /700 /800 /900 /1000mm




2-AXIS ROTARY MAGNET FEEDTHROUGH (AMFW SERIES)
Allowable Leak Rate 1.33 x 10-11 Pa·m3/sec Maximum
Drive Method Magnet Coupling
Straight Power 60N
Rotation Torque 0.8N · m (First and Second axis)
Allowable Heating Temperature 200 degrees C Maximum
Connect Flange ICF70 /ICF114
Travel Flange ICF70
Axis Travel Diameter First axis: φ10       Second axis: φ10
Stroke 400 /500 /300 /700 /800 /900 /1000mm