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RHEED Electron Gun
& Power Supply
(RDA-003G/004P) |
RHEED Image
Analysis System
(kSA400) |
Real-time Monitoring
of Wafer/Thin
Film Temperature
(kSA BandiT) |
Real-time Monitoring
of Thin Film Curvature/
Stress
(kSA MOS) |
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Ex-situ Curvature/Stress
2D/3D Mapping of
Substrates up to 300mm
(kSA MOS Ultra Scan) |
UHV Evaporator/
Magnetron
Sputtering Cell |
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Please click on the link, which will take you to Japanese page
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Rotary/Linear Motion
Feedthrough |
UHV Manipulators |
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Please click on the link, which will take you to Japanese page
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| Vacuum Pump |
Vacuum Pump
Peripheral Products |
Valve |
Vacuum component
parts
(O-ring, Nipple, Clump,
etc.) |
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| Flange |
Gasket |
Viewport |
Glass Component |
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| Vacuum Gauge |
Gauge Head, Filament |
Quadruple Mass
Spectrometer (Q-MS) |
Thin Film Deposition
Growth Rate Monitor
/Controller and
Film Thickness
Measurement |
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| Electrical Feedthrough |
Leak Detector |
Heating/Cooling
Equipment |
Mass Flow Controller
(MFC),
Mass Flow Meter,
etc. |
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| Others |
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