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  Thermal Desorption Spectroscopy (TDS) System for Hydrogen Analysis

The "TDS System for Hydrogen Analysis" developed in collaboration with NIMS (National Institute of Material Science) allows the user to measure/analyze the mass of hydrogen contained in a steel piece. It is optimal for inspecting the Hydrogen embrittlement of a steel piece or a product.
[ Summary ]
  • Allows quantitative measurement of Hydrogen inside a steel piece under atmospheric environment where corrosion takes place.
  • Allows mass measurement of Hydrogen desorbed from a heated steel piece using a high sensitive Q-MS.
  • Allows real-time desorption analysis.
  • Equipped with the standard Hydrogen leak, which allows the quantitative measurement of hydrogen
  • Equipped with twin Turbo Molecular Pumps installed vertically, which allows residual Hydrogen inside the analysis chamber.
  • Equipped with a load-lock chamber, which helps to exhaust introduction of a steel piece without exposing thermal resistant tube and analysis chamber to the air.
  • Up toφ20mm x 50mm steel piece can be measured.
  • Equipped with a touch panel to control Pumps and Valves.


[ Specifications ]

Max. pressure 1 x 10-7Pa or lower
Pump (analysis chamber) Magnetically-levitated TMP (300L/sec)
+ Pivot Bearing TMP (50L/sec) + Rotary pump (200L/min)
Hydrogen background 2 x 10-9Pa or less
Accuracy 0.01ppm (weight %) = 5g with SUS sample
Detection sensitivity 2 x 10-13Pa
Standard leakage Leakage amount of H2 gas (high accuracy calibration at 3 points)
3.9 x 10-6atm · cc/s = approx. 75torr
1.9 x 10-5atm · cc/s = approx. 350torr
3.9 x 10-5atm · cc/s = approx. 760torr
Heating temp RT~1000°C
Heating speed 50°C/hr~600°C/hr (Tolerance: +/-10°C)
Sample size φ5mm x 10mm~φ20 x 50mm
Thermal resistant tube φ32mm O.D. x 700mm (length)
Pump (load-lock chamber) TMP (190L/sec w/ N2)
Sample introduction Magnet feedthrough
Hydrogen computing software - Displays spectra of desorbed hydrogen
- Calculates amount of desorbed Hydrogen based on the standard leak gas value
- Calculates difference between Hydrogen background and desorbed Hydrogen
- Calculates desorbed Hydrogen weight in ppm
- Exports to Excel, etc.