The kSA 400 is an analytical RHEED system designed to
extract real-time, quantitative information about the thin-film surface by proper
analysis of the static or evolving diffraction pattern. Please inquire us of the
details.
The kSA Multi-beam Optical Sensor(MOS) is an extremely sensitive laser based system
for in-situ, real-time monitoring of thin film strain. This system is ideally
suited for real-time feedback to process control systems in the production or
research environment.
The kSA BandiT is a non-contact, non-invasive, real-time, absolute wafer temperature
sensor. kSA BandiT provides a viable solution for low-temperature wafer monitoring
where pyrometers cannot measure. It is also insensitive to changing viewingport
transmission, stray sources, and signal contribution from substrate heaters.
The kSA RateRat Pro is a deposition rate monitor and advanced process control
system. This non-invasive, in-situ, optically based product makes thin-film deposition
monitoring simple. By combining real-time calculations of deposition rate, layer
thickness and optical constants with powerful advanced process control software,
RateRat Pro makes monitoring even the most complex multi-layered materials easy
and precise.
