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RHEED
30kV Electron Gun & Power Supply with Remote Controller

PICO-RHEED 
RHEED for Organic Thin Films

SPR
Surface Plasmon Resonance Spectrometer
Amida Filter
Deodorizing Filter to be used with an Electric Fan
UHV Evaporator
Single-cell or Triple-Cell
Flux Monitor incorporated

Vacstage
UHV Manipulators

i-GONIO
UHV-compatible LHe Gonio Head

TDS
Thermal Desorption Spectroscopy System for Hydrogen Analysis of
a Metal Piece

LPDMA
Low-Pressure Differential Mobility
Analyzer

K-Cell, Valved Cracker Cell,
RF Plasma Cell,DC Power Supply,
Heated Viewport,

Automated Valve Positioner

Desktop CVD System
For Carbon Nanotube (CNT) Synthesis
Models
• Basic
• Premium
• Professional
 
kSA Emissometer 
Ex-Situ MOCVD Wafer Carrier Inspection System

kSA ICE 
All-In-One In-situ Metrology Tool for GaN MOCVD

kSA400
Complete Analysis of RHEED Pattern Images/Movies

kSA BandiT
In-situ Monitoring of Wafer/Thin
Film Surface Temperature

kSA MOS
In-situ Monitoring of
Thin Film Curvature/Stress

kSA MOS Ultra Scan
2D/3D Mapping of
Thin Film Curvature/Stress

kSA RateRat Pro
In-situ Monitoring of
Deposition Rate/Film Thickness/
Reflectivity/n, k
High Vacuum 
Thin Film Deposition System for Josephson Junction Superconductor Applications

MEB 550 S System


High Purity
Deposition Materials

For all types of thin film applications

Joule-Thomson
based refrigerators
for Optical studies, Hall Measurement Systems, Seebeck Measurement Systems, and Micro Probe systems.

e-Gun (Thermionics)
Single/Multiple Crucible,
Linear/Rotary/Hydra,
3kW to 15kW

Valve

Vacuum gauge,
Q-MS, MFC


Non Evaporable
Getter (NEG) pump


VD85 -
Digital Compact Vacuum Meters/Data Loggers



JSAP Spring Meeting, 2019
Japan Society of Applied Physics – 66th Spring Meeting 2019
    March 9 to 12, 2019
     Tokyo Institute of Technology, Ookayama Campus
JSAP 2019
Japan Society of Applied Physics - 80th Autumn Meeting 2019
    September 18 to 21, 2019
    Hokkaido University, Sapporo Campus
 
SEMICON JAPAN 2019
The exposition for Semiconductor Manufacturing
    December 11 to 13, 2019
    Tokyo Big Sight
 
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