R-DEC Co., Ltd.

RHEED
30kV Electron Gun & Power Supply with Remote Controller

PICO-RHEED
RHEED for Organic Thin Films

SPR
Surface Plasmon Resonance Spectrometer

Amida Filter
Deodorizing Filter to be used with an Electric Fan

UHV Evaporator
Single-cell or Triple-Cell
Flux Monitor incorporated

Vacstage
UHV Manipulators

i-GONIO
UHV-compatible LHe Gonio Head

TDS
Thermal Desorption Spectroscopy System for Hydrogen Analysis of
a Metal Piece

LPDMA
Low-Pressure Differential Mobility
Analyzer

K-Cell, Valved Cracker Cell,
RF Plasma Cell,DC Power Supply,
Heated Viewport,
Automated Valve Positioner

Desktop CVD System
For Carbon Nanotube (CNT) Synthesis

Models
• Basic
• Premium
• Professional

kSA Emissometer
Ex-Situ MOCVD Wafer Carrier Inspection System

kSA ICE
All-In-One In-situ Metrology Tool for GaN MOCVD

kSA400
Complete Analysis of RHEED Pattern Images/Movies

kSA BandiT
In-situ Monitoring of Wafer/Thin
Film Surface Temperature

kSA MOS
In-situ Monitoring of
Thin Film Curvature/Stress

kSA MOS Ultra Scan
2D/3D Mapping of
Thin Film Curvature/Stress

kSA RateRat Pro
In-situ Monitoring of
Deposition Rate/Film Thickness/
Reflectivity/n, k

High Vacuum
Thin Film Deposition System for Josephson Junction Superconductor Applications
MEB 550 S System

High Purity
Deposition Materials
For all types of thin film applications

Joule-Thomson
based refrigerators for Optical studies, Hall Measurement Systems, Seebeck Measurement Systems, and Micro Probe systems.

e-Gun (Thermionics)
Single/Multiple Crucible,
Linear/Rotary/Hydra,
3kW to 15kW

Valve

Vacuum gauge,
Q-MS, MFC

Non Evaporable
Getter (NEG) pump

VD85 -
Digital Compact Vacuum Meters/Data Loggers

JSAP Spring Meeting, 2019 Japan Society of Applied Physics – 66th Spring Meeting 2019 March 9 to 12, 2019 Tokyo Institute of Technology, Ookayama Campus
JSAP 2019 Japan Society of Applied Physics - 80th Autumn Meeting 2019 September 18 to 21, 2019 Hokkaido University, Sapporo Campus
SEMICON JAPAN 2019 The exposition for Semiconductor Manufacturing December 11 to 13, 2019 Tokyo Big Sight