 RHEED
Electron Gun & Power Supply |
 Joule-Thomson
based Micro Miniature
Refrigerators for Optical studies, Hall effect measurement, Seebeck effect measurement, and Microprobe systems.
|
 kSA400
RHEED Image
Analysis System |
 e-Gun
Single / Multiple Crucible,
Linear / Rotary / Hydra,
3kW to 15kW
|
 kSA
BandiT
Real-time Monitoring
of Wafer/Thin
Film Temperature
|
 Valve (VAT)
|
 kSA
MOS
Real-time Monitoring
of
Thin Film Curvature/
Stress |
 Vacuum gauge, Q-MS, MFC (MKS) |
 Evaporator
Single-cell or Triple-Cell
Flux Monitor incorporated
|
 K-Cell (Veeco) |
 Vacstage
UHV Manipulators |
 SPR
Surface Plasmon Resonance Spectrometer
|
 i-GONIO
UHV Compatible High-Precision
Goniohead with 5-axis Stage for Operation at Cryogenic Temperature
(blow 10K)
|
 LPDMA
Low-Pressure Differential Mobility
Analyzer
|
 TDS
Thermal Desorption Spectroscopy System for Hydrogen Analysis
|
 Desktop CVD System
Carbon Nanotube (CNT) |
| |
 Desktop CVD System
ZnO Nanorod
|
